http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009120363-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bfe885803ddfc021f4f5ad13b5cc26b5 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45578 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4401 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3244 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32477 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-045 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 |
| filingDate | 2007-05-02^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2e293a000131a14b3d763245018d35bb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8ccd1e6b710619ee393ee71d1f409c9c |
| publicationDate | 2009-05-14^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2009120363-A1 |
| titleOfInvention | Gas Supply Pipe for Plasma Treatment |
| abstract | Peeling off of a deposited film formed on the outer surface of a gas supply pipe is effectively prevented, and adhesion of a deposited film which has been peeled off to the inner surface of a container or to a nozzle-sealed surface can be prevented as much as possible. n A gas supply pipe 4 for plasma treatment which is inserted in a container 3 held in a plasma treatment chamber 1 to form a deposited film on the inner surface of the container 3 by the supply of a gas for plasma treatment to the inside of the container 3 , wherein a supply pipe main body 5 constituting the entire gas supply pipe 4 is formed of a material having a thermal expansion coefficient of 10×10 −6 /° C. or less. As a result, the possibility that a deposited film formed on the outer surface of the gas supply pipe 4 is peeled off by thermal expansion or thermal shrinkage of the gas supply pipe 4 is reduced. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018197591-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011030236-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013224384-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9555435-B2 |
| priorityDate | 2006-05-17^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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