| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26 |
| filingDate |
2008-01-23^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ee54e4403803c9a1a560614dbb73f546
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4975bf9abd8e9be46a025d87d13c2592
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fd88cce7193f9976ede48b396403b8aa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_585ca7a93a045194a3d08d09f67ffb5b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_101914f8e2bde1eda408f43600fdbf8d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3e146de08af1ef4527cab6b3dc70b54d |
| publicationDate |
2009-07-23^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2009186294-A1 |
| titleOfInvention |
Organic graded spin on barc compositions for high na lithography |
| abstract |
An antireflective coating that contains at least two polymer components and comprises chromophore moieties and transparent moieties is provided. The antireflective coating is useful for providing a single-layer composite graded antireflective coating formed beneath a photoresist layer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011073013-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011080016-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9040232-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012129353-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8357482-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015197664-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015227043-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011272643-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9447303-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I806856-B |
| priorityDate |
2008-01-23^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |