http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010003826-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32559 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32477 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32467 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D3-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D1-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 2009-09-14^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ee1ac460c125b7c08f5a5f7c22a6d517 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3969644e6cd4342f1315cdcb99818cb5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dbd95b2e5dafc3a3e3c16efb60be6715 |
| publicationDate | 2010-01-07^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2010003826-A1 |
| titleOfInvention | Corrosion resistant component of semiconductor processing equipment and method of manufacture thereof |
| abstract | A corrosion resistant component of a plasma chamber includes a liquid crystalline polymer. In a preferred embodiment, the liquid crystalline polymer (LCP) is provided on an aluminum component having an anodized or non-anodized surface. The liquid crystalline polymer can also be provided on an alumina component. The liquid crystalline polymer can be deposited by a method such as plasma spraying. The liquid crystalline polymer may also be provided as a preformed sheet or other shape adapted to cover the exposed surfaces of the reaction chamber. Additionally, the reactor components may be made entirely from liquid crystalline polymer by machining the component from a solid block of liquid crystalline polymer or molding the component from the polymer. The liquid crystalline polymer may contain reinforcing fillers such as glass or mineral fillers. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8970114-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2023177492-A1 |
| priorityDate | 2000-12-29^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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