| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_76ba102ea9c02b6633d64bf09c5b89a4 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02458
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02502
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02658
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02381
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0262
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02513
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0254 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20 |
| filingDate |
2008-10-24^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1f1577acd099f6cde01f71cc5c3fbac5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1c80cfb11fd6d1c1df6b7d1e4e26fa18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a4006c3e86bfe231d30ae90d0d4297cd |
| publicationDate |
2010-02-04^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2010029064-A1 |
| titleOfInvention |
Group iii-nitrides on si substrates using a nanostructured interlayer |
| abstract |
A layered group III-nitride article includes a single crystal silicon substrate, and a highly textured group III-nitride layer, such as GaN, disposed on the silicon substrate. The highly textured group III-nitride layer is crack free and has a thickness of at least 10 μm. A method for forming highly textured group III-nitride layers includes the steps of providing a single crystal silicon comprising substrate, depositing a nanostructured In x Ga 1-x N (1≧x≧0) interlayer on the silicon substrate, and depositing a highly textured group III-nitride layer on the interlayer. The interlayer has a nano indentation hardness that is less than both the silicon substrate and the highly textured group III-nitride layer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010119845-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013104802-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013175671-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9481943-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9481944-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8173462-B2 |
| priorityDate |
2005-08-31^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |