| abstract |
The present invention provides a chemically amplified positive composition comprising: n (A) a resin comprising a structural unit having an acid-labile group and being itself insoluble or poorly soluble in an alkali aqueous solution but becoming soluble in an alkali aqueous solution by the action of an acid, n (B) a resin comprising a structural unit represented by the formula (I): n n n n n n n n n n wherein R 1 represents a hydrogen atom, a halogen atom, a C1-C4 alkyl group or a C1-C4 perfluoroalkyl group, Z represents a single bond or —(CH 2 ) k —CO—X 4 —, k represents an integer of 1 to 4, X 1 , X 2 , X 3 and X 4 each independently represents an oxygen atom or a sulfur atom, m represents an integer of 1 to 3 and n represents an integer of 0 to 3, and a structural unit having a fluorine atom in a side chain, and n an acid generator. |