| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8a49ac2da6da1c329e89898e0a7f9c2e |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06K19-07749
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06K19-07775
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06K19-07779
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01Q7-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01Q1-2283 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-78 |
| filingDate |
2007-11-26^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_56123aa7e886b0ea2ea1b8148ad0b405 |
| publicationDate |
2010-04-01^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2010081235-A1 |
| titleOfInvention |
Method for manufacturing rf powder |
| abstract |
A method for manufacturing RF powder wherein the RF powder is composed of a large amount of particles and used as collective RF powder (a powdery entity); and a large amount of RF powder particles can be obtained from a wafer in a stable manner and at a high yield is provided. n The method for manufacturing RF powder is a method for manufacturing RF powder composed of a large amount of particles 11 a each having a substrate 12 and a magnetic coupling circuit device 15 . This method includes a step S 11 of forming many antenna circuit devices 39 on a wafer 40 ; a gas dicing step S 13 for drawing dicing grooves on a wafer to locate positions of separation of magnetic coupling circuit devices; a protection film formation step S 14 for coating surrounding areas of the magnetic coupling circuit devices with a protection film; a reinforcement step S 15 for attaching the wafer to a supporting plate using an adhesive sheet; a grinding step S 16 for grinding the backside of the wafer until the dicing grooves are reached; and a separation step S 17 for separating the circuit devices by removing the supporting plate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016133476-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9502857-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9362105-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8477072-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9202754-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3258488-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013019499-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017148888-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107527878-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8440487-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009289228-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021122083-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8188924-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11679527-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016276223-A1
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8772133-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9704749-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9082840-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017076970-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9040389-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110112569-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9281182-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013277806-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10157765-B2 |
| priorityDate |
2006-11-27^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |