http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010149722-A1

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publicationNumber US-2010149722-A1
titleOfInvention Selectable capacitance circuit
abstract A voltage-controlled capacitor and methods for forming the same are described. A mechanical conductor membrane of the voltage-controlled capacitor is movable to and from a first position and a second position. An amount of capacitance can vary with the movement of the mechanical conductor membrane. A microelectromechanical systems (MEMS) voltage-controlled capacitor can be used in a variety of applications, such as, but not limited to, RF switches and RF attenuators.
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