| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_37b416a8c0d2b0f1c3d6026d932027af |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C2043-025 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C43-021 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C35-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C35-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C43-52 |
| filingDate |
2010-08-04^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_418eeafe964960bd5b9e32279151125e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3a1854319b6dc69ea1a660b15c359171
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_01a9ddd36c495b22ccbddddc776beea8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_137eaaf4fc2918d21409c499de23b534
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3d9bc7c6fba010192e0c1b0d3db68c68 |
| publicationDate |
2011-02-10^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2011031658-A1 |
| titleOfInvention |
Method of reducing the dimension of an imprint structure on a substrate |
| abstract |
A method of reducing the dimension of an imprint structure on a substrate, the method comprising the steps of:n (a) providing a substrate having at least one imprint structure thereon, said structure being formed of an inorganic-organic compound comprising an inorganic moiety and a polymer moiety, said polymer moiety having a lower vaporization temperature than the melting point of said inorganic moiety; and (b) selectively removing at least part of the polymer moiety while enabling at least part of the inorganic moiety to form a substantially continuous inorganic phase in said imprint structure, wherein the removal of the at least part of the polymer moiety from the imprint structure reduces the dimension of the imprint structure. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9362126-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013078796-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-115477864-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11281094-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014085511-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014085511-A3 |
| priorityDate |
2009-08-04^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |