| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2002-14241
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2002-14419 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-883
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1642
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1646
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-055
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1629
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1631
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1623
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1628
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-161
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-14233
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-074 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-053
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-187
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-23
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-055
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-135
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05C5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-29 |
| filingDate |
2010-08-17^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_40f11a56f6d71aef1204d6a6d0b20d34 |
| publicationDate |
2011-02-24^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2011043573-A1 |
| titleOfInvention |
Piezoelectric actuator, method for manufacturing piezoelectric actuator, liquid-ejecting head, and liquid-ejecting apparatus |
| abstract |
A piezoelectric actuator includes a substrate; a diaphragm overlying the substrate; a lower electrode overlying the diaphragm; a piezoelectric body overlying the lower electrode; an upper electrode that includes a first upper sub-electrode which overlies the piezoelectric body and which has a first sputtering rate and also includes a second upper sub-electrode which overlies the first upper sub-electrode, which has a second sputtering rate less than the first sputtering rate, and which is the uppermost layer; and a protective film extending over side surfaces of the piezoelectric body and the second upper sub-electrode, a portion of the protective film that overlies the second upper sub-electrode being removed by sputtering. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/IT-201800005824-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11242242-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9401471-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013162726-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10751996-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8672455-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019232659-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2566327-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019130881-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7155656-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011228013-A1 |
| priorityDate |
2009-08-18^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |