| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-221
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J27-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32192
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3222 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-24 |
| filingDate |
2010-07-09^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_17dc079e9764176b8f0546e7fcaa10bf |
| publicationDate |
2011-03-31^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2011076420-A1 |
| titleOfInvention |
High efficiency low energy microwave ion/electron source |
| abstract |
A microwave charged particle source is provided according to various embodiments of the invention. The microwave charged particle source can include a coaxial antenna for generating microwaves and a dielectric layer surrounding the antenna. The microwave charged particle source can also include a first gas line outside the dielectric layer for providing sputtering gases and/or a second gas line for providing cooling gas in a space between the antenna and dielectric layer. The microwave charged particle source can further include a containment shield partially surrounding the dielectric layer and an extraction grid disposed on or near an aperture in the containment shield. In use, charged particles can be formed with the generated microwaves from sputtering gases. And the charged particles can be accelerated under an electric field created from a voltage applied to the extraction grid. A method for providing microwave charged particle source is also provided. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10858727-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2023013437-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8679594-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2023048896-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113786716-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009238998-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010078315-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010078320-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9324597-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012031335-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011076422-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9018108-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011097517-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009238993-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8349156-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2022512764-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009277778-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009283400-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8057649-B2 |
| priorityDate |
2008-01-30^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |