| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_37eca35591a598b124616f188740caf8 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-044
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-562
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-243
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-12 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-56 |
| filingDate |
2011-01-04^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9d074f16bfa457fbb7f34a279d0a218e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b9b3de22dbd102dc4f3da58de07c0706 |
| publicationDate |
2011-08-04^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2011186820-A1 |
| titleOfInvention |
Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method |
| abstract |
A thin film deposition apparatus, a method of manufacturing an organic light-emitting display device by using the thin film deposition apparatus, and an organic light-emitting display device manufactured using the method. In the thin film deposition apparatus for forming a thin film on a substrate, the apparatus includes a deposition source that discharges a deposition material; a deposition source nozzle unit disposed at a side of the deposition source and including a plurality of deposition source nozzles arranged in a first direction; a patterning slit sheet disposed opposite to the deposition source nozzle unit and including a common deposition region at an end of the patterning slit sheet and a plurality of patterning slits on the other end in a second direction perpendicular to the first direction, where each of the plurality of pattering slits includes a plurality of patterning sub slits that are different in length; and a barrier plate assembly disposed between the deposition source nozzle unit and the patterning slit sheet in the first direction, and including a plurality of barrier plates that partition a deposition space between the deposition source nozzle unit and the patterning slit sheet into a plurality of sub-deposition spaces. The thin film deposition apparatus is separated from the substrate by a predetermined distance. The thin film deposition apparatus and the substrate are movable relative to each other. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015048328-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10340313-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11730012-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9224591-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11730048-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016006001-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9660191-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011088622-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017125496-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010307409-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11785831-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11706969-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10002910-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11700747-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8882920-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9644272-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111129359-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022045145-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014175391-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8884316-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11581487-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8876975-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8859438-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9236581-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012319145-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014183483-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015021582-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9246123-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11751415-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11744101-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11751455-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9508946-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9246135-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9453282-B2 |
| priorityDate |
2010-02-01^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |