| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_88fc7f9eb617072238851d46591a0c76
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2ecf0563cb9edcbadddc1ab12d423e73
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_20ca540cf6706c644e02dd78763bcf31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_18c7db7da5a6deaed58933197c46eb63
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_faee838d2ff0837297bda1b38fb00480 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F05D2260-607 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F04D29-701
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B9-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4405
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F04D19-042 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B9-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B5-00 |
| filingDate |
2011-08-08^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ca165c766a3a9a2d4bd714de94b4940b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ca206047304c332dcb3cce215a959ca5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cf359e1d5e546f7ce7df61d0ee9ac487
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d2232ca6d5219dfc97bc399d8930429f |
| publicationDate |
2011-11-24^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2011284035-A1 |
| titleOfInvention |
Method of cleaning turbo pump and chamber/turbo pump clean process |
| abstract |
A method of cleaning a turbo pump is described. The turbo pump is coupled with a CVD chamber of depositing a material and thus accumulates the material therein. The method includes switching off the turbo pump and using another pump to pump a reactive gas, which can react with the material to form gaseous products, through the turbo pump. Thereby, the turbo pump is cleaned up and is prevented from being a particle source in subsequent CVD operations. |
| priorityDate |
2007-05-29^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |