| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e6e225e35195c1dabec8d180a6cce557
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3721d42d63d02253af7d7aea0c081814
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_94a50808b6cc57187b1eaf9c6dd9061f |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4407
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4412
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45557 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D29-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D46-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-74 |
| filingDate |
2012-05-31^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f747999b43aa1f2f34c3942126e4cd72
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5da832507b8a705ef8f806fcc8a685eb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2c8b668b9f6c02344422eab30636e2be |
| publicationDate |
2012-12-06^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2012304930-A1 |
| titleOfInvention |
Chamber exhaust in-situ cleaning for processing apparatuses |
| abstract |
Apparatuses and systems are disclosed for exhausting by-products from a processing chamber. In an embodiment, a dual exhaust system for removing by-products from a processing chamber includes a first exhaust line and a second exhaust line with each line having a pressure control valve and a particle trap for removing by-products. A portion of the first exhaust line may be coupled in parallel with the second exhaust line. The second exhaust line can be isolated from the first exhaust line and cleaned while the first exhaust line is removing by-products from the processing chamber or vice versa. In one embodiment, an exhaust system for removing by-products from a processing chamber includes an exhaust line and valves for removing the by-products. The valves are designed to operate at a high temperature such that the heated by-products are in a vapor phase while being removed through the exhaust line. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11572623-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10669626-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107887303-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10861717-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020261518-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10413946-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015204461-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9127358-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016348238-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10329668-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11742188-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10422035-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018096866-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014204660-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I723226-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018174822-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102014105294-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10672591-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018371611-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021050190-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017008044-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2756876-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022170151-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012180719-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10229831-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10022758-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-6718566-B1 |
| priorityDate |
2011-06-03^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |