| abstract |
The present invention relates to an antireflective coating composition comprising a crosslinking agent, a polymer comprising at least one chromophore group and at least one hydroxyl and/or a carboxyl group, and an additive, further where the additive has structure 1 and comprises at least one arylene-hydroxyl moiety, n n n n n n n n n n where Y is selected from an carboxylate anion or sulfonate anion, R 1 , R 2 , and R 3 are independently selected from unsubstituted C 1 -C 8 alkyl, substituted C 1 -C 8 alkyl, aryl and arylene-hydroxyl; X 1 , X 2 , and X 3 are independently selected from direct valence bond and C 1 -C 8 alkylene group, and, n=1, 2 or 3. The invention further relates to a process for using the composition. |