| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3086 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F2-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F2-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C59-02 |
| filingDate |
2012-10-09^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3bf2bc4346f0f2066e437ce88b73b0e6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_acabf15d36bd2f826eff6d8162ec300f |
| publicationDate |
2013-02-07^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2013032971-A1 |
| titleOfInvention |
Method for forming patterns and method for producing patterned substrates |
| abstract |
A resist layer constituted by a resist composition (which may include unavoidable impurities) including a polymerizable compound that includes polyfunctional monomers that become polymers having three dimensional structures by cross linking when polymerized and a polymerization initiating agent which is activated by one of light and an electron beam is formed on a substrate. A surface of a mold having a predetermined pattern of protrusions and recesses is pressed against the resist layer. Light is irradiated onto the resist layer to cure the resist layer. The mold is separated from the resist layer under conditions that the temperature of the resist layer is 40° C. or greater. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160021274-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105378893-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11635683-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10613433-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012177769-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10535519-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016098314-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9522998-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9507263-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014220353-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10386717-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101967966-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110546734-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10293543-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9704710-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8651849-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9376581-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10353239-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017212394-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10456974-B2 |
| priorityDate |
2010-04-09^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |