| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0c468e687b43595cae7cb1c2667678f1 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02C20-30 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4412
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4405
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-0236 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-02 |
| filingDate |
2012-12-13^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_29d5c00825f2f580ae0b79cd66308762
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bfb6f2073ac3c4e6d1c96b0911bb15e1 |
| publicationDate |
2013-06-20^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2013156950-A1 |
| titleOfInvention |
Film-forming apparatus and film-forming method |
| abstract |
A film-forming apparatus 1 includes a reaction chamber 2 , an exhaust mechanism 3 , and a pipe 4 connecting them. An inert gas supply pipe 11 supplying an inert gas 15 in the pipe 4 , and a trap section 5 ′ connecting with an exhaust pipe 16 exhausting a reaction product 14 are provided in the pipe 4 . A substrate is disposed in the reaction chamber 2 and film formation is performed on the substrate by supplying a reaction gas 7 from a reaction gas supply pipe 8 . The reaction product 14 is collected in the trap section 5 ′. An inert gas 15 is supplied to the trap section 5 ′ to pressure-feed the reaction product 14 from the exhaust pipe 16 to a detoxifying apparatus 20 . Cleaning is performed by supplying a cleaning gas 21 to the reaction chamber 2 and exhausting the same while bypassing the trap section 5. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9957611-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016348238-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017067152-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10669626-B2 |
| priorityDate |
2011-12-14^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |