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publicationDate 2013-07-18^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2013183793-A1
titleOfInvention Process and hardware for deposition of complex thin-film alloys over large areas
abstract Systems and methods for depositing complex thin-film alloys on substrates are provided. In particular, systems and methods for the deposition of thin-film Cd 1-x M x Te ternary alloys on substrates using a stacked-source sublimation system are provided, where M is a metal such as Mg, Zn, Mn, and Cu.
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