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publicationDate 2013-09-26^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2013250992-A1
titleOfInvention Method for manufacturing semiconductor device and semiconductor device
abstract A semiconductor device comprising a substrate made of a material with a hexagonal crystal structure and having a substrate axis which is perpendicular to a principal surface of the substrate; and a nitride-based group III-V compound semiconductor layer grown directly on and in contact with the principal surface of the substrate without growing a buffer layer between the substrate and the nitride-based group III-V compound semiconductor layer, wherein, a direction of a growth axis of the semiconductor layer is substantially the same as a direction of the substrate axis of the substrate.
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