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publicationDate 2013-10-03^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2013260468-A1
titleOfInvention Methods for the analysis of liquid halosilanes
abstract Methods for the direct analysis of liquid halosilanes. In particular, methods for using graphite furnace atomic absorption (GFAA) spectrometric analysis to evaluate the purity of liquid halosilanes by identifying and quantitatively measuring trace elements or impurities, such as, but not limited to metal species that may be present in liquid halosilanes.
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