| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4c95659b2f89ce5bb8f97fe754382c50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c5520dd38cc403678d9f91e0b0ee95fb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e97014be1435a411a26b43ddd2f0ee8f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_aef200f1f84b1cf9e2ba6a02075c2eba
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_42f6bd93eefe0b750cb1c7db0335fa32 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K59-35 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K50-805
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K50-844
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L51-0008
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-166
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-191
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-243
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B33-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B33-10 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-00 |
| filingDate |
2011-12-14^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f4a50f519c324b6b2847864d4a41cea3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e5c62010fdba96d3f3ef91d7b66ec629
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d733d451f80218ce9b048b93b9bc8a7e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1ab47fc60682f349022a3c759e4eb53d |
| publicationDate |
2013-10-03^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2013260501-A1 |
| titleOfInvention |
Vapor deposition device, vapor deposition method, and method of manufacturing organic electroluminescent display device |
| abstract |
A vapor deposition device ( 50 ) in accordance with the present invention includes: a vapor deposition source ( 80 ) which has a plurality of injection holes ( 81 ) from which vapor deposition particles are to be injected towards a film formation substrate ( 60 ); a plurality of pipes ( 83 a and 83 b ); a vapor deposition source crucible ( 82 ) for supplying the vapor deposition particles to the vapor deposition source ( 80 ); and moving means for moving the film formation substrate ( 60 ) relative to the vapor deposition source ( 80 ). The pipes ( 83 a and 83 b ) are connected to first and second sides of the vapor deposition source ( 80 ) on one end side and the other end side, respectively, of a line of the injection holes ( 81 ). |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014014036-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10597770-B2 |
| priorityDate |
2010-12-21^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |