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publicationDate 2014-02-20^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2014049923-A1
titleOfInvention Thin film disposition
abstract A method of preparing a surface for deposition of a thin film thereon, wherein the surface including a plurality of protrusions extending therefrom and having shadowed regions, includes locally treating at least one of the protrusions.
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