| abstract |
Disclosed is a layered product for fine pattern formation and a method of manufacturing the layered product for fine pattern formation, capable of easily forming a fine pattern having a thin or no remaining film in order to form a fine pattern having a high aspect ratio on a processing object. The layered product for fine pattern formation (1) of the present invention used to form a fine pattern ( 220 ) in a processing object ( 200 ) using a first mask layer ( 103 ) includes: a mold ( 101 ) having a concavo-convex structure ( 101 a ) on a surface; and a second mask layer ( 102 ) provided on the concavo-convex structure ( 101 a ), wherein in the second mask layer ( 102 ), a distance (lcc) and a height (h) of the concavo-convex structure ( 101 a ) satisfy Formula (1) 0<lcc<1.0 h, and a distance (lcv) and the height (h) satisfy Formula (2) 0≦lcv≦0.05 h. |