| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_52a8f0784452c75ea801e57d59779904
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_98c0a0064139474da7d3af72ee7de749
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_99a10d416a1f08c9c0997e783c2f6852
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4c98192476f5277c1bd884cf19d48113
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_419e116b3994645a4a9c5e48c65e81f4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ffcfee4715ce61f83190d1b1c7730cdd |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2218-34 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-3678
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-02366
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C15-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-1884 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-18 |
| filingDate |
2012-08-29^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f1373e4d3ce340556a5abd09feb15438
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c881512aeb627b2b509d8ec31397fef4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0ed241d10ff0181a1e493650c8a4e95f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dac9d747515b645b57c6683eb688d70e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7ba0b314af8a6fcd622a4ed3b0bf10bd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dd694a0dbed53d728154d07c804c5529 |
| publicationDate |
2014-06-19^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2014170799-A1 |
| titleOfInvention |
Method of manufacturing glass substrate with concave-convex flim using dry etching, glass substrate with concave-convex film, solar cell, and method of manufacturing solar cell |
| abstract |
[Problem] A problem is to provide a method of manufacturing a glass substrate with a concave-convex film using dry etching capable of giving a fine concave-convex structure precisely by dry etching, a glass substrate with a concave-convex structure, a solar cell, and a method of manufacturing a solar cell. n [Means to Solve the Problem] In order to give a concave-convex structure to a glass substrate made of a plurality of oxides placed in different vapor pressures during dry etching, a subject film forming step and a concave-convex structure forming step are provided. The subject film forming step forms a subject film made of a single material on a flat surface of the glass substrate. The concave-convex structure forming step forms a periodic concave-convex structure in a surface of the subject film by dry etching. As a result, a fine concave-convex structure is formed precisely by dry etching. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014138613-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113184800-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9000414-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10550032-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1626276-B1 |
| priorityDate |
2011-08-30^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |