| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5858f3a8fd92eec55e7647eb2c9f8992 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-546 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D1-00 |
| filingDate |
2011-09-30^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2ffedf812662b9babce8504ceb15b3a8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4bf0c74ea56213fae3351d40f59d9651
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0ac92f60194bcd422c1013e9d031ff59 |
| publicationDate |
2014-07-24^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2014205762-A1 |
| titleOfInvention |
Method for depositing film and film deposition system |
| abstract |
A method for depositing a film includes depositing an oil repellent film having an enhanced abrasion resistance properties and which is suitable for practical use. A film deposition system, wherein a substrate holder having a substrate holding surface for holding a plurality of substrates is provided rotatably to inside a vacuum container, can include an ion source provided to inside the vacuum container to have a configuration and in an arrangement and/or a direction, by which an ion beam can be irradiated only to a partial region of the substrate holding surface. A deposition source can be provided to inside the vacuum container such that a film deposition material of an oil repellent film can be supplied to the whole region of the substrate holding surface. An operation of the ion source can be stopped before starting operation of the deposition source. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016177451-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9315415-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011151247-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9246135-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014014917-A1 |
| priorityDate |
2011-09-30^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |