http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015021690-A1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7595ef38818cfddb7d1d01b1b66cc051
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02255
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7849
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02612
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7848
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-785
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02614
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0262
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-308
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30604
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02529
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02532
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66795
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-845
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1211
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-0886
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-0924
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02236
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-088
filingDate 2013-07-18^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_907d01b34f255979d4625829905206a0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ed2a55e1b6cda55d9ac61e94524054a6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9598b84e64aae0dccad8910f314b7dbd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_83e330ee09deecbf3c1d150295b61fee
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_67d32cf403031fcc2ccb37031032e681
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fc15669b75f78750cdb7396b4062c029
publicationDate 2015-01-22^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2015021690-A1
titleOfInvention Fin transformation process and isolation structures facilitating different fin isolation schemes
abstract Methods and semiconductor structures formed from the methods are provided which facilitate fabricating semiconductor fin structures. The methods include, for example: providing a wafer with at least one semiconductor fin extending above a substrate; transforming a portion of the semiconductor fin(s) into an isolation layer, the isolation layer separating a semiconductor layer of the semiconductor fin(s) from the substrate; and proceeding with forming a fin device(s) of a first architectural type in a first fin region of the semiconductor fin(s), and a fin device(s) of a second architectural type in a second fin region of the semiconductor fin(s), where the first architectural type and the second architectural type are different fin device architectures.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10990722-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9236309-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11660304-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021057552-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015268189-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9905480-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018012809-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019341472-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200066160-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017084494-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9941150-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11712442-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017294354-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015214331-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10068766-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017133406-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015255295-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9627245-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11349013-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102370293-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10020201-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9691764-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10847638-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10840355-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9831248-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9911658-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10217658-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111554635-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9716174-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10978352-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9224865-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9093496-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9704737-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10020221-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10062614-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102020119859-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11264268-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10020229-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9799514-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016225631-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10388571-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9691765-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9859148-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9735060-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11744835-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015137256-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11744836-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11331009-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10898494-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9076673-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017005102-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111816555-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9570288-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2020006532-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11404323-B2
priorityDate 2013-07-18^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014124863-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013181263-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013330889-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014159123-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013244387-A1
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419527022
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID61330
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6327157
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414638504
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6327222
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520721
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523397
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID74123
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24553
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426098968
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17358
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419518429

Showing number of triples: 1 to 106 of 106.