| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_da83301433ef16cb58f4ed2389304ae2 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2219-24 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J19-2415
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J19-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-029
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-046 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-04 |
| filingDate |
2014-11-26^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_715248c60b9fb6e739436755e771f079
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3004a0fd915afa32f5d113525b76bd8a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2d4205e6ed96858ba5414342eecf4563 |
| publicationDate |
2015-03-19^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2015078980-A1 |
| titleOfInvention |
Method and apparatus for producing disilane through pyrolysis of monosilane |
| abstract |
An apparatus for producing disilane through pyrolysis of monosilane, includes: a monosilane pyrolysis unit; a solid particle removal unit which removes solid particles generated in the pyrolysis unit; a condensing unit which liquefies and collects unreacted monosilane, and disilane and higher silanes with three (3) to seven (7) silicon atoms as pyrolysis products excluding hydrogen from a gas with the solid particles removed; a first separation unit which separates monosilane from a mixture of the liquefied unreacted monosilane, disilane and higher silanes; and a second separation unit which separates disilane and higher silanes from the mixture with the monosilane removed. In accordance with the present disclosure, disilane can be produced economically and efficiently with high purity through pyrolysis of monosilane. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11401166-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11097953-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10752507-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11377359-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113083166-A |
| priorityDate |
2012-06-13^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |