patent/US-2015267295-A1

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015267295-A1

Outgoing Links

Predicate	Object
assignee	http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2a3bb4ae410da4be8184239adc5ab1c0
classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4583 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45557 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68757 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68785 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4586 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45504 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4581 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B6-105 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68742
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-458 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B6-10
filingDate	2014-03-19^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_48be90ace4e7edd9a1ff247a56a23dbd http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0162f9152ebfbfa76848458e3923135d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8e95d01ba601d45097e01a382df34d3b
publicationDate	2015-09-24^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	US-2015267295-A1
titleOfInvention	Removable substrate tray and assembly and reactor including same
abstract	A substrate tray, a susceptor assembly including a substrate tray, and a reactor including a substrate tray and/or susceptor assembly are disclosed. The substrate tray is configured to retain a substrate during processing and can be formed of a substantially non-reactive material. The substrate tray can be received by a susceptor, formed of another material, to form the susceptor assembly.
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