Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_33c922e05f6133b7d72dbb849d77487d |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05C5-0245 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05C5-0254 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05C11-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05C5-008 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05C5-005 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05C9-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05C11-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05C5-0254 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05C11-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05C9-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05C5-02 |
filingDate |
2014-02-28^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e3ea1d2c6a61362a41483be3daf19612 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_53a3a37cff5467dce288bca17adc9953 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_907b008c8a49e5415652e07b407679f5 |
publicationDate |
2015-10-01^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-2015273514-A1 |
titleOfInvention |
Slot die coating apparatus |
abstract |
The present application relates to a slot die coating apparatus and, more particularly, to a slot die coating apparatus which can ensure the coating stability of a substrate film by reducing pressure oscillations within a vacuum chamber when slot die coating is carried out. The slot die coating apparatus according to the present application can effectively dampen pressure oscillations within a vacuum chamber by connecting a pressure oscillation reducing tank to the vacuum chamber and thus can ensure the coating stability of a substrate film, resulting in a reduction in the proportion of defective products. |
priorityDate |
2013-02-28^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |