| abstract |
Disclosed is a sensor device including a plurality of substrates vertically stacked, a plurality of heaters formed on at least one selected substrate and separated from each other in a horizontal direction, a plurality of sensing electrodes formed at least one selected substrate on a top portion of the substrate on which the plurality of heaters are formed and separated in the horizontal direction, and a plurality of materials configured to respectively contact the plurality of sensing electrodes and formed separately from each other. |