http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015364321-A1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b051f9f7933c758e66f6ceda5c9fb2cc
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01B3-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02318
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02351
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02348
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02109
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02345
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02216
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02203
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-56
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B3-18
filingDate 2015-06-05^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0a772046f35877b4c0cb2f2a83d5f022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1d352978bcd5077268ace6d2b84123ed
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e2ae3fc2e4cff909bc97e82d9a15fd23
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5719178b1f41d7ab2eae07118e1feaf4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8a1a62fffe6926a274f503bda1f17ec4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c320830b38fb171958505990e1281a1d
publicationDate 2015-12-17^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2015364321-A1
titleOfInvention Alkyl-Alkoxysilacyclic Compounds and Methods for Depositing Films Using Same
abstract A method and composition for producing a porous low k dielectric film via chemical vapor deposition is provided. In one aspect, the method comprises the steps of: providing a substrate within a reaction chamber; introducing into the reaction chamber gaseous reagents including at least one structure-forming precursor comprising an alkyl-alkoxysilacyclic compound, and a porogen; applying energy to the gaseous reagents in the reaction chamber to induce reaction of the gaseous reagents to deposit a preliminary film on the substrate, wherein the preliminary film contains the porogen, and the preliminary film is deposited; and removing from the preliminary film at least a portion of the porogen contained therein and provide the film with pores and a dielectric constant of 2.7 or less. In certain embodiments, the structure-forming precursor further comprises a hardening additive.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I729417-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11043374-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3476971-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3676417-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019246061-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019241763-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112334597-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019134663-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I676632-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200035493-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019046449-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11158498-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3872223-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102442026-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111383910-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021050798-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022066508-A1
priorityDate 2014-06-16^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013075876-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6583048-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016049293-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010289013-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003232137-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008268177-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011198578-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013079484-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009325381-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6005128-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010295029-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008113178-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004216641-A1
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419526444
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419545610
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID248226671
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3776
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420189581
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458392451
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129238348
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559517
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129412139
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419545604
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID123318
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID702
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID123490915
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412231793
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID57375577
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414859283
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512635
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129265031
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129629974
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419579250
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449132750
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID433080588
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420184161
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393758
http://rdf.ncbi.nlm.nih.gov/pubchem/taxonomy/TAXID8010
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226394040
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID158413528
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID430755686
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419484729
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416010849
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419549337
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID432204601
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129547010
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID324921920
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12757
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414877488
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129247180
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419593329
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID324845150
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128154791
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416025866
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2244
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID123699826
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10352
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6403
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393742
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID74848
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID92221
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15480
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15965
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7463
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419643656
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID582107
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426081504
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7462
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9266
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID547996
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128267625
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID588616
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10219356
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID783
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127617247
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128473253
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127667887
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128054004
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129591652
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID674
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID100917236
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419546450
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24823
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13609
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410524311
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129454861
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7459
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520721
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6556
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID54092491
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226406400
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425193155
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID123246246
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523814
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226406399
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129221330
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128248264
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID123317802
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6557
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559478
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419547008
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416004738
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID123562378
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID74123
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410566403
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID123367332
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7503
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419511972
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414876800
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128367232
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8135
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451167973
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14896
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419557953
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419555680
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127620580
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415790044
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID324447066
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8473
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419557869
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8079
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID433350632
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14796
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128568918
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8078
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID312
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226403893
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6654
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID158318766
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419518747
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID433080590
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID588534
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129709128
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID327846322
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID327126480
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419522398
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID433350633
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128726141
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128650995
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419557911
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID159793266
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419540783
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419545871
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID433350634
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128944008
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129930311
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID433010290
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7044
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID154441011
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6131
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID85883577
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID324046646
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129390452
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16773
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID144205
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID123550989
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12682
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7845
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID154501051
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17782167
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID433010292
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129328364
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6547
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393650
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID154501050
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458112191
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415834150
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID323771181
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID433010291
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID245561428
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID323301019
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID560499
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416029475
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419517745
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416025823
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15167
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID407043279
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128482383
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID114789
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416021904
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9233
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419544406
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129504034
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID248038898
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID91517
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID325830947
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17497
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID322829548
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415848888
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID542478
http://rdf.ncbi.nlm.nih.gov/pubchem/anatomy/ANATOMYID8010
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID593840
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1031
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23676152
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9238
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559584
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID70434
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559583
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID322997660
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID101289664
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID323629401
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449260044
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22311
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6616
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9623
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416001974
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419474478
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226394110
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5365543
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410542567
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6517
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520344
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID136833
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128818366
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID27756
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128086918

Showing number of triples: 1 to 264 of 264.