| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bede441f67e7c92531efef3ed615a926 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2203-0286
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-0136 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C99-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N3-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q60-366
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L5-0038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q10-045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q20-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L1-148
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q20-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q20-00 |
| filingDate |
2015-06-17^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_256ec1c7b4200137dd765f938321033a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fb40b9eeef8ecaa713c950cdb48a3181 |
| publicationDate |
2015-12-24^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2015369839-A1 |
| titleOfInvention |
Design and interface of a microfabricated scanning force sensor for combined force and position sensing |
| abstract |
A micro fabricated sensor for micro-mechanical and nano-mechanical testing and nano-indentation. The sensor includes a force sensing capacitive comb drive for the sensing of a force applied to a sample, a position sensing capacitive comb drive for the sensing of the position of a sample and a micro fabricated actuator to apply a load to the sample. All the sensor components mentioned above are monolithically integrated on the same silicon MEMS chip. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110926974-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3690423-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11307125-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015527936-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108414378-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3489654-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018053625-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11435378-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10410822-B2 |
| priorityDate |
2014-06-24^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |