| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_38ed56a4b4e8e2315b2b3308bffedb3f |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-542
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67253
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4405
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67069 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-54 |
| filingDate |
2014-06-20^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_432d30c0ec3e16f53d75ab159c1b7091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b1ab7df1bbeed00c3d9c11e5088bc10b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_18feed8602b54177446b1086bc8ae07b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b2e84644e07441f36665c775c2acb1f7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_daf0a542a26f03720e39d8b2a9b30db5 |
| publicationDate |
2015-12-24^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2015371882-A1 |
| titleOfInvention |
Semiconductor manufacturing apparatus |
| abstract |
A semiconductor manufacturing apparatus includes a chamber, a view port window on a sidewall of the chamber and configured to receive an optical emission spectroscopy (OES); and an air distributor located between the view port window and an inner space of the chamber. The air distributor includes a hollow region aligned with the transparent window and configured to generate an air curtain in the hollow region to isolate the view port from the inner space. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019103295-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11670490-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10262841-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11521838-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10490466-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11339733-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017062286-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021225684-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018151457-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11791192-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11043388-B2 |
| priorityDate |
2014-06-20^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |