http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016307902-A1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1000c9e819bcdb940ee9c9d1bc86f355
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1085
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-03
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28568
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D7-63
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45525
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F9-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K5-3442
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28556
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-60
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L49-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-108
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F9-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285
filingDate 2016-04-15^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0394b115c21830fc6f992279fb75a919
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b5ad3c76f48803152fe7b8951dce4ac5
publicationDate 2016-10-20^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2016307902-A1
titleOfInvention Niobium-containing film forming compositions and vapor deposition of niobium-containing films
abstract Niobium-containing film forming compositions are disclosed, along with methods of synthesizing the same, and methods of forming Niobium-containing films on one or more substrates via vapor deposition processes using the Niobium-containing film forming compositions.
priorityDate 2015-04-16^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008038466-A1
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458121980
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226395293
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458121979
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23942
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458122107
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458121981
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415788807
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458122109
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419531149
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419518510
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458122108
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23912
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419547026
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458001921
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414859283
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12734
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID123105
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226433246
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226451454
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23676152
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226394040
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419583146
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID90560
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520470
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449986641
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID82839
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3672
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419516651
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2724049
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6410758
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7947
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID82849
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415841568
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID139222
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24818
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458214277
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23960
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419530175
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419577454
http://rdf.ncbi.nlm.nih.gov/pubchem/anatomy/ANATOMYID1969
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419578887
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226398189
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6547
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419577455
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419577457
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID455502203
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID71601
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13428060
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419577459
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458394586
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23936
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23992
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID455495000
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415712602
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419577475
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23980
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID18420357

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