http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017025305-A1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02197
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02194
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02192
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02293
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0642
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823481
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76229
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76297
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76224
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76232
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0242
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-762
filingDate 2016-10-07^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_15c31ac78394568dea434cbc69f28a69
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6a5f69c3f59b08f18c724a24f7736558
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fa57155a94ec485068066724e7721ca7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_746ea9fd3c21bb3a748aa98fc9912a51
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9109b68b55594387713c374f294c46cb
publicationDate 2017-01-26^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2017025305-A1
titleOfInvention Shallow trench isolation regions made from crystalline oxides
abstract A method of manufacturing a semiconductor device that involves etching a trench in a semiconductor substrate, epitaxially growing a crystalline structure in the trench and forming semiconductor structures on either side of the crystalline structure. Crystalline oxides may include rare earth oxides, aluminum oxides or Perovskites.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10388766-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11011624-B2
priorityDate 2014-06-16^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013228893-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8853781-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8168971-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7521369-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9589827-B2
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID159410
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454517284
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419525060
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID150906
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21959931
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450068310
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID159427
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451818717
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448205702
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419557764
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21225548
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450964499
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31170
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID82899
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453284447
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID159371
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452498775
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452597930
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID159374
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9989226
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID447510518

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