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inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_edfa71bbfe5e76fd6b801853863905be
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publicationDate 2017-03-02^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2017063016-A1
titleOfInvention System for reclaiming, rebalancing and recirculating laser gas mixtures used in a high energy laser system
abstract The present invention relates to a system for recirculating the gas atmosphere within an excimer laser system, where contaminates, created in the laser's operation, are removed, and the gas concentrations of additive gases, such as Xe, Kr, or others, depleted in the laser operation, are rebalanced to specific lazing mixtures by analyzation and component replenishment from one or more external supplies.
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