| abstract |
A pressure sensitive element has a support substrate, a sensor electrode, a pressure sensing film and an insulating layer; the pressure sensing film being arranged opposing to the sensor electrode; the insulating layer having an opening, and being provided between the support substrate and the pressure sensing film; at least a part of an opening edge of the opening being fallen on the sensor electrode; an exposed part as a part of the sensor electrode being exposed inside the opening, leaving a buried part as the other part of the sensor electrode buried under the insulating layer. |