http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017133241-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_13f128bb4ef9763e15cefc15b7af1196 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05B1-30 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67028 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31058 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02057 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05B1-30 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3105 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05B1-30 |
| filingDate | 2017-01-13^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fb3636440b4afd5ec61edb50bc10b3ed http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0e3081e68a66c83f3c79397075fc440e |
| publicationDate | 2017-05-11^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2017133241-A1 |
| titleOfInvention | Dry separation apparatus, nozzle for generating high-speed particle beam for dry separation |
| abstract | A dry separation method is a dry separation method for ashing a photoresist, including a spraying and separating step of spraying sublimation particles on the photoresist and separating the photoresist. A dry separation apparatus is a dry separation apparatus for ashing a photoresist, including a nozzle for generating a high-speed particle beam that includes sublimation particles. The nozzle generates ultra-high speed uniform nanoparticles by passing therethrough a particle generation gas including carbon dioxide, and includes an expanding portion having a shape so that the cross sectional area thereof becomes wider toward a discharge side of the nozzle. The expanding portion sequentially includes a first expanding portion and a second expanding portion, and an average expansion angle of the second expanding portion is bigger than an expansion angle of the first expanding portion. |
| priorityDate | 2015-06-13^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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