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publicationDate 2018-04-12^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2018102434-A1
titleOfInvention Vertical channel oxide semiconductor field effect transistor and method for fabricating the same
abstract A semiconductor device includes: a channel layer surrounded by a source layer; a first dielectric layer around the source layer; a gate layer around the channel layer and on the source layer; a first oxide semiconductor layer between the gate layer and the channel layer; a second oxide semiconductor layer between the gate layer and the drain layer; a second gate dielectric layer between the second oxide semiconductor layer and the drain layer; a drain layer on the gate layer and around the channel layer; and a second dielectric layer around the drain layer.
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