http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019019708-A1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68764
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68771
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67754
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-324
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67772
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67742
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67745
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6719
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67196
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67207
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67109
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67115
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67098
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-677
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-687
filingDate 2018-09-11^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a16ed40520302c60578c85aa796e7e21
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5648cf08e596cd1a3515ddebb9890d3b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4afeec300e34465e0393896df54515aa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8199b09599cf23e5796691d760e23033
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_79110c4f39f64ec3bfa076bff3d077b5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d62730b8945cc1e1e84d8062059e7da5
publicationDate 2019-01-17^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2019019708-A1
titleOfInvention Buffer Chamber Wafer Heating Mechanism And Supporting Robots
abstract Buffer chamber including robots, a carousel and at least one heating module for use with a batch processing chamber are described. Robot configurations for rapid and repeatable movement of wafers into and out of the buffer chamber and cluster tools incorporating the buffer chambers and robots are described.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10854483-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11110383-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11610773-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11694912-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11462417-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11756803-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11581183-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11177128-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11749555-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11527421-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11705337-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11018032-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11361978-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11469113-B2
priorityDate 2015-04-20^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/anatomy/ANATOMYID1467
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3033637
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419505014

Showing number of triples: 1 to 47 of 47.