| abstract |
A 3D semiconductor device including: a first level with first single crystal transistors; contact plugs; a first metal layer, where a portion of the contact plugs provide connections from the first transistors to the first metal, where connections formed logic circuits; a second level with second transistors; a third level with third transistors, where the second level overlays the first level, and where the third level overlays the second level; a second metal layer overlaying the third level, second level includes first memory cells where each of the memory cells include at least one of the second transistors; and vertically oriented conductive plugs, where the second transistors are aligned to the first transistors with less than 100 nm alignment error, where the second transistors are junction-less transistors, where one end of each of the vertically oriented conductive plugs are connected to the second metal layer, where at least one of the vertically oriented conductive plugs is disposed directly on one of the contact plugs. |