http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019256353-A1

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filingDate 2019-02-19^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2019-08-22^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2019256353-A1
titleOfInvention High-volume millimeter scale manufacturing
abstract A method for manufacturing a millimeter scale electromechanical device includes coupling a stainless steel ply to a polymer carrier ply, coating the stainless steel ply in a photo resist material, masking the photoresist material, exposing the photoresist material to cure a portion of the photoresist material, developing the photoresist material to remove uncured photoresist material from the stainless steel ply, chemically etching the stainless steel ply to remove a patterned portion of the stainless steel ply, dissolving the polymer carrier ply to release unwanted chips of the stainless steel ply, and adhering the patterned stainless steel ply to a flexible material ply to form a sub-laminate.
priorityDate 2013-02-22^^<http://www.w3.org/2001/XMLSchema#date>
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