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filingDate 2019-03-21^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bcbc97b8ad624ebc307790f385a9fcb7
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publicationDate 2019-09-26^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2019295237-A1
titleOfInvention Design aided image reconstruction
abstract Methods and systems for determining boundaries of patterned features formed on a specimen from an unresolved image of the specimen are provided. One system includes computer subsystem(s) configured for comparing a difference image in which patterned feature(s) are unresolved to different simulated images. The different simulated images are generated by simulating difference images generated for the patterned feature(s) formed on the specimen with different perturbations, respectively. The computer subsystem(s) are configured for, based on the comparing, assigning an amplitude to each of the different perturbations. The computer subsystem(s) are further configured for determining one or more boundaries of the patterned feature(s) formed on the specimen by applying the different perturbations to one or more designed boundaries of the patterned feature(s) with the assigned amplitudes.
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11470283-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021099679-A1
priorityDate 2018-03-23^^<http://www.w3.org/2001/XMLSchema#date>
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