http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2020057369-A1

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filingDate 2019-07-31^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_153d9ab45d90d19234e4e5282fb77563
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2f245ddfecb97f7771c44d356e4580e0
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publicationDate 2020-02-20^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2020057369-A1
titleOfInvention Salt, acid generator, resist composition and method for producing resist pattern
abstract Disclosed is a salt represented by formula (I): n n n n n n n n n n wherein, in formula (I),n Q 1 and Q 2 each independently represent a fluorine atom or the like, R 1 and R 2 each independently represent a hydrogen atom or the like, Z represents an integer of 0 to 6, X 1 represents *—CO—O— or the like, where * represents a bonding site to C(R 1 )(R 2 ) or C(Q 1 )(Q 2 ), L 1 represents a single bond or a saturated hydrocarbon group, and —CH 2 — included in the saturated hydrocarbon group may be replaced by —O—, —S—, —SO 2 — or —CO—, A 1 represents a divalent alicyclic hydrocarbon group which may have a substituent, R a represents a cyclic hydrocarbon group which may have a substituent, and Z + represents an organic cation.
priorityDate 2018-08-17^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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