http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021364917-A1

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filingDate 2021-07-27^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_62e2892b2a05b9e1f66c57d72e144851
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b66c56ecf806d54b7598f9507555ed2b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2755db4cf58164bd00e91fcc1d759dcc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2ee0e7ae3c8a0a5115e1d805c445c1a6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9d773c26933f47f09f8fae9fcf14edf1
publicationDate 2021-11-25^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2021364917-A1
titleOfInvention Actinic ray-sensitive or radiation-sensitive resin composition, resist film, pattern forming method, and method for manufacturing electronic device
abstract The present invention provides an actinic ray-sensitive or radiation-sensitive resin composition having excellent storage stability during long-term storage. In addition, also provided are a resist film, a pattern forming method, and a method for manufacturing an electronic device, each relating to the actinic ray-sensitive or radiation-sensitive resin composition. The actinic ray-sensitive or radiation-sensitive resin composition of an embodiment of the present invention includes a compound represented by General Formula (I) and an acid-decomposable resin.M1+A−-L-B−M2+  (I)
priorityDate 2019-01-28^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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