| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5bf9be40ab8c29e8fb83fd6674af4a27 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-0207
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2207-097
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2207-07 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00095
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-0029 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00 |
| filingDate |
2021-02-19^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_229254e391578bf43cb065573100f796
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_77b9b2fe0d508506ea67d4705fe1ecfa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ea399111f5979c4de8cfcd518c488b8f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b86dcf5f164695f33c93bca91098f814
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0a6c42afa45eb599d2ac9ac36aec784a |
| publicationDate |
2022-12-29^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2022411261-A1 |
| titleOfInvention |
Crossovers for vacuum packaging |
| abstract |
In some embodiments, electromechanical systems including a semiconductor layer that has a planar surface and includes conductive and adjacent non-conductive regions and a hermetic seal applied above the planar surface and methods of manufacturing the systems are disclosed. In some embodiments, electromechanical devices that include first and second planar semiconductor layers are disclosed. Each of the semiconductor layers includes conductive regions, and at least one conductive region from each of the layers is electrically coupled to each other. Methods of manufacturing the electromechanical devices are also disclosed. |
| priorityDate |
2020-02-21^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |