| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B35-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B35-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20 |
| filingDate |
1962-10-23^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1967-01-31^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bf8a653cd16e9cbb9abb3646c83ade13
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_84d02f12b118839e73e1a7f8bc1648bf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6929e1b196bca5dc47dafdf5810c8698 |
| publicationDate |
1967-01-31^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-3301213-A |
| titleOfInvention |
Epitaxial reactor apparatus |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3511723-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4284867-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3675619-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3923464-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3957547-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3659552-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3384049-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3661636-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3424628-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4499354-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3424629-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3421933-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3456616-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3473954-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4293755-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3472684-A |
| priorityDate |
1962-10-23^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |