| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4d41fe9656b66c5b9df93c441b1492ed |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F3-101 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F3-10 |
| filingDate |
1967-02-17^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1970-11-24^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4cbcd558540dedceb983c1a797a6b951 |
| publicationDate |
1970-11-24^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-3543291-A |
| titleOfInvention |
Photolithography |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3772022-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3973954-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3973953-A |
| priorityDate |
1967-02-17^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |