abstract |
A RADIATION SENSITIVE COMPOUND COMPRISES A TETRASUBSTITUTED BORATE ANION AND AN ORGANIC CATION CONTAINING AN ATOM SELECTED FROM THE GROUP CONSISTING OF NITROGEN, ARSENIC, TIN, ANTIMONY, SULFUR, IODINE, PHOSPHORUS, OXYGEN, TITANIUM, PALLADIUM, CHROMIUM AND COBALT. THESE COMPOUNDS CAN BE SPECTRALLY SENSITIZED AND CAN BE USED IN PHOTORESISTS AND FOR LITHOGRAPHY. |