abstract |
A METHOD OF HEATING AN ARTICLE, SUCH AS A SILICON SILCE, INCLUDES CENTRIFUGALLY FORCING THE ARTICLE AGAINST A SURFACE OF A SUPPORT OF A HEAT-CONDUCTING MATERIALS, AND HEAING THE SUPPORT, WHILE THE ARTICLE IS SO FORCED AGAINST THE SUPPORT TO HEAT THE ARTICLE BY CONDUCTION THROUGH THE SUPPORT. IN ORDER TO COAT THE ARTICLE, A COATING SUBSTANCE, SUCH AS A MIXTURE OF SILICON TETRACHLORIDE AND HYDROGEN GAS, IS IMPINGED AGAINST THE ARTICLE. |