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http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4588
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-458
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
filingDate 1971-12-23^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 1974-04-23^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 1974-04-23^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-3806360-A
titleOfInvention Methods for heating and/or coating articles
abstract A METHOD OF HEATING AN ARTICLE, SUCH AS A SILICON SILCE, INCLUDES CENTRIFUGALLY FORCING THE ARTICLE AGAINST A SURFACE OF A SUPPORT OF A HEAT-CONDUCTING MATERIALS, AND HEAING THE SUPPORT, WHILE THE ARTICLE IS SO FORCED AGAINST THE SUPPORT TO HEAT THE ARTICLE BY CONDUCTION THROUGH THE SUPPORT. IN ORDER TO COAT THE ARTICLE, A COATING SUBSTANCE, SUCH AS A MIXTURE OF SILICON TETRACHLORIDE AND HYDROGEN GAS, IS IMPINGED AGAINST THE ARTICLE.
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