| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d2051317369a779747701bc0ebe411a4 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-033
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823892 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-033
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8238 |
| filingDate |
1976-05-10^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1977-09-06^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9118483cba4dd7435a0765b350f891ac |
| publicationDate |
1977-09-06^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-4046606-A |
| titleOfInvention |
Simultaneous location of areas having different conductivities |
| abstract |
The process employs both silicon dioxide and silicon nitride layers used for selectively masking areas to be etched in order to allow a single photomask to be used for defining areas having different conductivities simultaneously, thereby eliminating problems caused by misregistry between photomasks. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0020144-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4244752-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4528581-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-8203945-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4382827-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-8301538-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-RE30282-E
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4378260-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4110126-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4128439-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4243435-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4257826-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4346512-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0020144-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4217149-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4170500-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4411058-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4314857-A |
| priorityDate |
1976-05-10^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |